样品编号 | 溅射功率(W) | 薄膜方块电阻(MΩ) | 电阻率(Ω·m) | 电导率(S/m) |
S1 | 30 | 6.40 | 1.0360 | 0.965 |
S2 | 60 | 4.61 | 0.5750 | 1.739 |
S3 | 90 | 1.82 | 0.5625 | 1.778 |
S4 | 120 | 0.594 | 0.4775 | 2.094 |
S5 | 150 | Overflow | --- | --- |