r | ng |
| vg |
|
0.05 μm | 12.9 | 0.020 | 0.078c | 0.258 |
0.10 μm | 14.3 | 0.011 | 0.070c | 0.167 |
0.15 μm | 16.8 | 0.010 | 0.060c | 0.168 |
0.20 μm | 19.9 | 0.008 | 0.050c | 0.158 |
0.25 μm | 21.9 | 0.006 | 0.046c | 0.128 |
0.30 μm | 25.2 | 0.004 | 0.040c | 0.092 |