| 编号 | 缺陷区域(um2) | 最大缺陷(um2) | 键合良品率 |
| 1 | 1.64E+06 | 1.21E+04 | 99.99% |
| 2 | 1.43E+05 | 8.00E+02 | 99.9994 |
| 3 | 0 | 0 | 100% |
| 4 | 1.97E+06 | 8.00E+03 | 99.99% |
| 5 | 8.51E+05 | 1.84E+04 | 100.00% |
| 6 | 4.32E+07 | 2.31E+06 | 99.76% |