| 序号 | 机台 | 本底真空 | 铝量 | 结构 | θ˚ | cosθ | k | a |
| 1 | 单轴机 | 0.015 Pa | 14圈 | 长方形 | 0 | 1.00 | 22.59 | 15.69 |
| 2 | 梯形 | 11.31 | 0.98 | 22.84 | 15.05 | |||
| 3 | 梯形 | 21.801 | 0.93 | 29.09 | 21.74 | |||
| 4 | 梯形 | 38.66 | 0.78 | 35.81 | 30.72 | |||
| 5 | 梯形 | 51.34 | 0.62 | 48.23 | 36.18 | |||
| 6 | 梯形 | 59.036 | 0.51 | 47.78 | 29.82 | |||
| 7 | 梯形 | 68.199 | 0.37 | 53.9 | 31.03 | |||
| 8 | 梯形 | 78.69 | 0.20 | 62.73 | 34.06 | |||
| 9 | 长方形 | 90 | 0.00 | 66.1 | 31.72 |