位置 硅片编号 | 1 | 2 | 3 | 4 | 5 |
1 | 0.628 | 1.538 | 0.627 | 1.589 | 0.687 |
2 | 0.628 | 1.559 | 0.675 | 1.602 | 0.825 |
3 | 0.766 | 1.618 | 0.649 | 1.520 | 0.814 |
4 | 0.758 | 1.533 | 0.658 | 1.709 | 0.945 |
5 | 0.714 | 1.579 | 0.714 | 1.671 | 0.911 |
6 | 0.781 | 1.622 | 0.764 | 1.541 | 0.945 |
7 | 0.712 | 1.616 | 0.686 | 1.536 | 0.897 |
8 | 0.599 | 1.415 | 0.697 | 1.416 | 0.834 |
平均值 | 0.698 | 1.560 | 0.684 | 1.573 | 0.857 |