位置

硅片编号

1

2

3

4

5

1

0.410

2.274

0.485

2.431

0.372

2

0.406

2.293

0.402

2.321

0.431

3

0.418

2.789

0.465

2.320

0.438

4

0.448

2.623

0.427

2.310

0.429

5

0.422

2.944

0.458

2.439

0.469

6

0.403

2.941

0.498

2.325

0.429

7

0.398

2.571

0.441

2.265

0.421

8

0.395

2.626

0.416

2.462

0.417

平均值

0.413

2.633

0.449

2.359

0.426