| 位置 硅片编号 | 1 | 2 | 3 | 4 | 5 |
| 1 | 5.340 | 7.831 | 4.785 | 6.762 | 4.099 |
| 2 | 5.088 | 6.952 | 4.625 | 7.367 | 5.038 |
| 3 | 4.825 | 7.776 | 4.514 | 7.793 | 5.204 |
| 4 | 4.641 | 7.639 | 4.549 | 8.432 | 5.925 |
| 5 | 5.103 | 7.389 | 4.994 | 7.874 | 5.117 |
| 6 | 5.233 | 8.126 | 5.364 | 8.466 | 5.303 |
| 7 | 5.225 | 7.985 | 5.032 | 8.554 | 5.090 |
| 8 | 4.069 | 6.975 | 4.979 | 7.561 | 5.544 |
| 平均值 | 4.941 | 7.584 | 4.855 | 7.851 | 5.165 |