位置 硅片编号 | 1 | 2 | 3 | 4 | 5 |
1 | 3.409 | 8.342 | 3.804 | 8.696 | 2.693 |
2 | 3.402 | 8.289 | 3.249 | 8.768 | 2.973 |
3 | 3.297 | 9.670 | 3.874 | 9.171 | 3.543 |
4 | 3.357 | 9.429 | 3.119 | 8.904 | 3.011 |
5 | 3.125 | 10.161 | 3.595 | 9.488 | 3.535 |
6 | 3.068 | 9.733 | 4.006 | 8.609 | 3.069 |
7 | 2.892 | 8.437 | 3.196 | 8.507 | 3.127 |
8 | 2.971 | 8.803 | 3.059 | 9.230 | 2.871 |
平均值 | 3.190 | 9.108 | 3.488 | 8.922 | 3.103 |