位置

硅片编号

1

2

3

4

5

1

3.409

8.342

3.804

8.696

2.693

2

3.402

8.289

3.249

8.768

2.973

3

3.297

9.670

3.874

9.171

3.543

4

3.357

9.429

3.119

8.904

3.011

5

3.125

10.161

3.595

9.488

3.535

6

3.068

9.733

4.006

8.609

3.069

7

2.892

8.437

3.196

8.507

3.127

8

2.971

8.803

3.059

9.230

2.871

平均值

3.190

9.108

3.488

8.922

3.103