轴	误差矩阵
X轴	$Δ T_{x} = [\begin{matrix} 1 & - ε_{x z} & ε_{x y} & d_{x} (x) \\ ε_{x z} & 1 & - ε_{x x} & d_{y} (x) \\ - ε_{x y} & ε_{x x} & 1 & d_{z} (x) \\ 0 & 0 & 0 & 1 \end{matrix}]$
Y轴	$Δ T_{y} = [\begin{matrix} 1 & - ε_{y z} & ε_{y y} & d_{x} (y) - y S_{x y} \\ ε_{y z} & 1 & - ε_{y x} & d_{y} (y) \\ - ε_{y y} & ε_{y x} & 1 & d_{z} (y) \\ 0 & 0 & 0 & 1 \end{matrix}]$
Z轴	$Δ T_{z} = [\begin{matrix} 1 & - ε_{z z} & ε_{z y} & d_{x} (z) - z S_{x z} \\ ε_{z z} & 1 & - ε_{z x} & d_{y} (z) - z S_{y z} \\ - ε_{z y} & ε_{z x} & 1 & d_{z} (z) \\ 0 & 0 & 0 & 1 \end{matrix}]$