| Specimen No. | Sputtering Power (W) | Sputtering Time (min) | Seebeck Coefficient (μV/K) |
| Sheet Resistance (Ω/□) | |
| Before Treatment | After Treatment | Thickness (nm) | ||||
| 1 | 25 | 5 | −68.4 | −118.9 | 45.76 | 6431 |
| 2 | 25 | 15 | −90.9 | −126.5 | 92.26 | 1059 |
| 3 | 80 | 5 | −55.9 | −134.2 | 151.11 | 530.3 |
| 4 | 80 | 15 | −52.5 | −121.4 | 386.41 | 102.5 |
| 5 | 80 | 25 | −49.7 | −94.3 | 850.26 | 50.33 |
| 6 | 80 | 40 | −52.3 | −75.2 | 881.95 |
|