编号 | X1 | X2 | D/L | S/Cos | EE% | DL% | Size (nm) |
1 | −1 | −1 | 0.115 | 2.193 | 78.0 | 0.46 | 11.9 |
2 | 1 | −1 | 0.185 | 2.293 | 75.4 | 0.45 | 11,9 |
3 | −1 | 1 | 0.115 | 3.707 | 77.0 | 0.46 | 11.5 |
4 | 1 | 1 | 0.185 | 3.707 | 76.3 | 0.45 | 21.9 |
5 | −1.414 | 0 | 0.1 | 3 | 77.2 | 0.45 | 14.2 |
6 | 1.414 | 0 | 0.2 | 3 | 75.2 | 0.45 | 11.1 |
7 | 0 | −1.414 | 0.15 | 2 | 67.8 | 0.41 | 13.2 |
8 | 0 | 0 | 0.15 | 4 | 72.7 | 0.44 | 12.5 |
9 | 0 | 0 | 0.15 | 3 | 60.6 | 0.36 | 13.8 |
10 | 0 | 0 | 0.15 | 3 | 71.0 | 0.42 | 14.9 |
11 | 0 | 0 | 0.15 | 3 | 74.8 | 0.44 | 27.8 |
12 | 0 | 0 | 0.15 | 3 | 77.2 | 0.45 | 14.9 |
13 | 0 | 0 | 0.15 | 3 | 74.8 | 0.45 | 14.2 |