New Wave 193SS Laser Ablation system New Wave 193SS激光剥蚀系统 | Agilent Agilent | ||
Laser wavelength | 193 nm | RF power | 1340W |
Energy density | 10.13 J/cm−2 | Cool gas flow | 15 L/min Ar |
Pulse energy output | 0.3 mJ | Carrier gas flow | |
Pulse repetition frequency | 10 Hz | Makeup gas flow | |
Pulse width | 4 ns | Detector mode | P/A |
Laser spot size | 36 μm |
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Washout time | 20 s |
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Ablation duration | 45 s |
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Carrier gas flow | |
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