| New Wave 193SS Laser Ablation system New Wave 193SS激光剥蚀系统 | Agilent Agilent | ||
| Laser wavelength | 193 nm | RF power | 1340W |
| Energy density | 10.13 J/cm−2 | Cool gas flow | 15 L/min Ar |
| Pulse energy output | 0.3 mJ | Carrier gas flow | |
| Pulse repetition frequency | 10 Hz | Makeup gas flow | |
| Pulse width | 4 ns | Detector mode | P/A |
| Laser spot size | 36 μm |
|
|
| Washout time | 20 s |
|
|
| Ablation duration | 45 s |
|
|
| Carrier gas flow | |
|
|