| Material | Thickness (nm) | WVTR (g/m2/day) | Transparency (%) | Life time (h) | References |
| SiNx | 340 | 5 × 10−6 |
|
| [120] |
| 有机/无机多层膜 | 1500 | 3.6 × 10−6 | 90 | 3600 | [121] |
| SiOx/SiNx | 100 | 1 × 10−2 | 90 | 7000 | [122] |